Abstract

AbstractPresented is a method to determine iteratively electron density, electron temperature, and gas temperature in medium pressure rare gas discharges. This method bases on the linear relationship between emission coefficient of continuum radiation and electron density according to electron‐atom‐bremsstrahlung. The radial profile of gas temperature is determined by solving the energy balance equation. The electron temperature is calculated from the reduced electric field strength and the degree of ionization. The received profiles and the values at axis permit to examine present theoretical conceptions and to estimate the influence of various elementary processes on discharge mechanism.

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