Abstract
Abstract By combination of energy and time of flight detection in ERDA or NRA measurement, the particles' masses can be determined, additionally to the depth information. This leads to unique depth profile determination even for complex targets. Combination with th concept of Jacobi transformations results in extremely fast measurements. In this paper, a way is shown how this concept can be realized even for accelerators ofenergies as low as about 1 MeV.
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