Abstract
Pulsed-laser deposition (PLD) of uniform films with low particulate densities requires uniform target ablation. Optimal conditions are achieved when the target is rotated and simultaneously translated. The rotation, translation, and laser-pulse repetition frequencies must all be incommensurate. The target must be moved symmetrically to the fixed laser beam. The temporal dependence of the distance between the beam and the target center must follow the law x 0 t 1/2 . The best results are expected for a circular top-hat beam shape.
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