Uniform coating of CVD diamond on metallic wire substrates

Abstract

Diamond was coated onto wire substrates of various transition metals (Mo, W or Ti) of 0.5 mm diameter by the microwave plasma CVD method from a gas mixture of the CO–H2 system. The CVD conditions for a uniform diamond coating were microwave power, 750–1100 W; total pressure, 2000 Pa; total flow rate, 200 ml min-1; CO concentration, 5 vol%; treatment time, 5 h. The wire substrates were mounted vertically or horizontally on a pyrophyllite susceptor, which was placed parallel to the irradiation direction of microwave power. Homogeneous and fine-grained diamond film was prepared on the whole surface of horizontal W wire substrate with a wire height of 2 mm from the susceptor. To obtain a dense diamond coating, the height has to be as low as possible in the plasma region, where the plasma density is higher at lower substrate temperature. Low pressure and high microwave power were suited for fine-grained coating. Diamond deposition rate was found to be more dependent on pressure than substrate temperature. As the pressure increased, a glassy carbon film was formed instead of diamond.