Uniaxial microscale 3D surface shape measurement based on π phase-shifting method

Abstract

In this paper, π phase-shifting method is proposed in the uniaxial microscopic 3D profilometry. Specifically, the π phase-shifting method uses two fringes with a phase difference of π, whose subtraction can effectively eliminate the background information and provide a more accurate modulation distribution. Compared with the ten-step phase-shifting method (PSM) and the Fourier transform method (FTM), with only one-fifth of the data acquisition of PSM, the proposed method (PM) can achieve almost the same measurement accuracy as that, but has higher measurement accuracy than FTM.