Abstract
A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB () at 1 m. The −3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.
Highlights
Ultrasound imaging has played an important role in various areas, such as medical diagnosis, medical treatment, nondestructive testing, and ultrasound microscopy [1,2,3]
Capacitive micro-machined ultrasonic transducers (CMUTs) array elements are composed of multiple sensitive cells connected in parallel
Each cell is CMUT array elements are composed of multiple sensitive cells connected in parallel
Summary
Ultrasound imaging has played an important role in various areas, such as medical diagnosis, medical treatment, nondestructive testing, and ultrasound microscopy [1,2,3]. Capacitive micro-machined ultrasonic transducers (CMUTs) have many advantages over conventional PMUTs, such as wide bandwidth, high mechanical-electrical conversion efficiency, and ease of integration with electronic circuits to enhance signal-to-noise ratio [2,8,9,10,11,12]. CMUT membranes have low mechanical impedance, which makes them match well with air and other fluid media, and are suitable for manufacturing in large arrays [2,6]. These characteristics promote CMUTs as the development direction for generation ultrasonic transducers. Cheng et al.and [15] fractional realized B-mode imaging of a in metal wirewhich limited the detection. Designed a CMUT-in-CMOS array, which achieved central phantom using a range
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