Understanding of plasticity size-effect governed mechanical response and incomplete die filling in a microscale double-punch molding configuration

Abstract

Direct replication of microscale patterns onto metal surfaces by compression molding with patterned dies is used to fabricate metal-based structures for microsystem applications. Micron scale plasticity governs both the mechanical molding response and the geometric fidelity of replicated patterns. Microscale molding replication offers a technologically relevant example in which various plasticity size effects manifest themselves and control the effectiveness of the fabrication process.Microscale compression molding of a single-crystal Al specimen was studied by combining experimentation with conventional and strain gradient plasticity finite element simulations. In the single-punch molding configuration, single rectangular punches with different widths and lengths were used. In the double-punch configuration, two identically-dimensioned rectangular punches with a spacing in between were used. Under single-punch molding at the micron scale, both the absolute punch width as well as the length-to-width ratio affected the characteristic molding pressure. Under double-punch molding, both the measured characteristic molding pressure and the material flow to fill the gap between the two rectangular punches exhibited a significant dependence on the spacing to punch-width ratio and—when this ratio was fixed—on the absolute spacing between punches. The present study elucidates the impact of plasticity size effects on the efficacy of pattern replication by molding at the micron scale.