Abstract
MEMS thermal transducers offer a promising technological platform for uncooled IR imaging. We report on the fabrication and performance of a 256x256 MEMS IR FPA based on bimaterial microcantilever. The FPA readout is performed using a simple and efficient optical readout scheme. The response time of the bimaterial microcantilever was <15 ms and the thermal isolation was calculated to be < 4x10<sup>-7</sup> W/K. Using these FPAs we obtained IR images of room temperature objects. Image quality is improved by automatic post-processing of artifacts arising from noise and non-responsive pixels. An iterative Curvelet denoising and inpainting procedure is successfully applied to image output. We present our results and discuss the factors that determine the ultimate performance of the FPA. One of the unique advantages of the present approach is the scalability to larger imaging arrays.
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