Uncooled Infrared Imaging Using a Substrate-Free Focal-Plane Array

Abstract

A substrate-free 160 times 160 focal-plane array (FPA) with a 60-mum times 60-mum pitch has been developed and used for an optical readout uncooled infrared (IR) detector. The supporting frame of the FPA is a temperature-variable one due to its large decreases in both heat capacity and thermal conductance. This thermal characteristic significantly increases the temperature change of the microcantilever, which depends on both the temperature change induced by its absorption of IR radiation and the linear superposition of the temperature prechange induced by other microcantilevers, and therefore improves the performance of the substrate-free FPA. In the proposed IR detector, the fabricated FPA had an average noise equivalent temperature difference (NETD) and a response time of 330 mK and 16 ms, respectively. Its performance increased by about 4.3 times compared with that of the substrate FPA that consists of the same microcantilevers.