Abstract
The rigorous coupled-wave technique is implemented to analyze a surface-relief dielectric grating in more and unconsidered details. In this work, the effect of various incident angles upon gratings with different ratio of the period to the incident wavelength were widely investigated for both TE and TM polarizations. Impact of number of space harmonics terms on efficiency of the first and zeroth orders of diffraction were studied for deep and shallow groove gratings. In analyzing the deeper groove grating, it is indicated that more space harmonics are required to approach to a stable solution. In addition, for structures smaller than the incident wavelength it is also shown that the most of the wave are diffracted into the zeroth order of diffraction. But, as soon as the incident angle is increased the first order diffraction efficiency is begin to increase and for larger angles it is being noticeable.
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