Unclassical ripple patterns in single-crystal silicon produced by femtosecond laser irradiation

Abstract

Laser-induced periodic surface structures (LIPSS) in single-crystal silicon upon irradiation with multiple linearly polarized femtosecond (fs) laser pulses (120fs, 800nm, 1kHz) were investigated under different laser fluence and pulse number. Unclassical ripples (U-ripples), which were nearly parallel to the polarization of the laser beam, were observed to form gradually on the top of classical ripples with the effective pulse number. Their periods were significantly longer than the laser wavelength, and increased with increasing both the laser fluence and pulse number in the current study. The relationship between the types of ripple patterns and their parametric dependence was established. The mechanism of U-ripple formation was attributed to the capillary wave, arising from the inhomogeneous temperature gradient combined with the electric field of the pulses in the molten surface layer.