Uncertainty evaluation in calibration of low-cost digital MEMS accelerometers for advanced manufacturing applications

Abstract

Advanced manufacturing applications often involve the use of vibration control systems for both process control and defect prevention. Recently, the use of networks of low-cost digital MEMS accelerometer has become a widespread practice, being an economically competitive and promising way to improve quality and productivity effectiveness. Nevertheless, due to the lack of metrological traceability, these devices are currently not reliable to quantify amplitude and frequency of the actual vibrational motion. In this work, contributions of uncertainty of a calibration procedure by comparison for digital MEMS accelerometers at high frequency are investigated in order to provide traceability to primary standard.