Abstract
In order to obtain the desired product quality, temperature is an important control parameter in chemical and semiconductor manufacturing processes. Generally, the temperature control system has nonlinear time-varying, slow response speed, time-delay and un-symmetric control input dynamic characteristics. It is difficult to accurately establish the dynamic model for designing a general purpose temperature controller to achieve good control performance. Here a model-free fuzzy sliding mode control strategy is employed to design an intelligent temperature controller with gain-scheduling scheme or gain auto-tuning algorithm for a closed chamber with heater one-way input only. The concept of gain scheduling is employed to adjust the mapping ranges of the input and output fuzzy membership functions during the control process for improving the transient and steady-state control performances. The experimental results show that the steady state error of the step input response is always less than 0.2°C without overshoot by using this intelligent control schemes. It is suitable for industrial temperature control systems.
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