Ultraviolet-visible metal-semiconductor-metal photodetectors fabricated from InxGa1−xN (0≤x≤0.13)

Abstract

Metal-semiconductor-metal (MSM) photodetectors have been fabricated on InxGa1−xN epitaxial films grown by metalorganic chemical vapor deposition within the composition range 0≤x≤0.13. The dark current and spectral response were measured for devices with a varying In mole fraction x. The devices, which had nominal finger widths and finger spacing of 5 µm, were biased with modest voltages in the range 2≤Vbias≤5 V. In general, turn-on wave-length and dark current increased with increasing x. Turn-on wavelengths ranged from λ=370 nm to 430 nm and dark current densities ranged from Idark=2×10−2 A/cm2 (Vbias=5 V, x≈0.05) to 9×104 A/cm2 (Vbias=2 V, x≈0.13) depending on the In content, x, of the device active area.