Abstract
The possibility of creating resonant ultraviolet (UV) sensors based on the structure of ZnO nanorods/La3Ga5SiO14 microbalance (LCM) has been investigated. The principle of sensor operation is based on the desorption of oxygen from the surface of ZnO nanorods upon irradiation with UV light and an increase in the concentration of charge carriers that leads to an increase in the capacitance of the structure of ZnO nanorods/LCM. It has been shown that UV radiation intensity affects the resonance oscillation frequency of the LCM sensor. After the end of irradiation, the reverse process of oxygen adsorption on the surface of ZnO nanorods occurs, and the resonance frequency of the sensor oscillations returns to the initial value.
Highlights
Zinc oxide (ZnO) is a wide bandgap semiconductor with good piezoelectric properties
ZnO nanorods/LCM UV sensor is based on the change in the resonance nance—at a frequency ofnanorods/LCM
A resonant UV sensor based on ZnO nanorods/LCM has been investigated
Summary
Zinc oxide (ZnO) is a wide bandgap semiconductor (bandgap width 3.37 eV) with good piezoelectric properties. Under the influence of UV radiation, oxygen is desorbed from the film surface, the result of which is the appearance of additional charges in the ZnO film, which change the resonance excitation frequency of bulk acoustic waves in the LCM. Al and Ag are usually used to fabricate electrodes on resonator surfaces These materials are not suitable for high-temperature processes to obtain ZnO films and nanorods on resonators surfaces due to using a high temperature and oxygen environment that leads to the oxidation of electrodes and degradation of their electrical properties. Are not suitable for high-temperature processes to obtain ZnO films and nanorods on resonators surfaces due to using a high temperature and oxygen environment that leads to the oxidation of electrodes and degradation of their electrical properAl and.
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