Abstract
Synthesis and characterization of Y-doped zirconia (YDZ) thin films grown under UV-photon irradiation are reported in this article. Zr-Y metal precursor alloy thin films were successfully oxidized into cubic crystalline zirconia at room temperature under ultra-violet (UV) irradiation. Detailed transmission electron microscopy studies reveal that films are pin-hole free and form distinct grain boundaries upon high temperature annealing. In-plane ac impedance spectroscopy studies indicate that UV grown films have comparable electrochemical properties to the YDZ films grown by other methods. UV synthesis would be an attractive route to grow high quality ultra-thin oxide electrolytes at relatively low temperatures.
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