Ultrathin (∼10nm) InN resistive gas sensor for selectivity of breath ammonia gas by using temperature modulation

Abstract

The advancement of epitaxial growth techniques of ultrathin InN crystalline has opened new opportunities to develop miniaturized selective gas sensors for the breath ammonia gas. The high quality (~ 10 nm) ultrathin InN coated with Pt catalytic layer have been fabricated for selective detection of breath ammonia gas by using temperature modulation technique for liver disease application. Temperature modulation technique is very effective method to enhance selectivity of gas sensor. We are using staircase temperature programming from (200 °C to 0 °C to 200 °C) and from (175 °C to 210 °C to 175 °C) for a single InN gas sensor can achieve the selectivity of ammonia gas, each temperature region act as virtual sensor, InN gas sensor will give different response in different temperature region. Percentage change in current in each temperature region is key factor to improve the selectivity of ammonia gas.