Ultrasonic Molding of Polymer Micro Devices

Abstract

Polymer micro devices or components are becoming more and more popular in bio-MEMS filed, such as micro-fluidic chips. In this paper, ultrasound provided by a commercial ultrasonic welding machine, was introduced to the molding process of micro devices from polymer films. Several layers of polymer films were ultrasonically heated and molded into a micro device. Micro-fluidic chips consisting of two substrates with micro-channels and connectors were demonstrated by ultrasonic molding process. The experiments show that ultrasonic molding based on multilayer of polymer films is a low-cost and high-efficiency method to fabricate micro polymer devices.