Abstract

A new micro-fine manufacturing method is proposed, that is the ultrasonic modulating compound synchronous pulse electro-discharged and electrochemical machining. By the micro-fine machining way, the μm-level precision may be acquired. The low voltage, the low electric conductivitys working fluid mixed with the nm powders is used, as the ultrasonic vibration effect and the nm powders' catalyst effect between the electrodes, the micro-spark electro-discharged and the micro-electrolysis machining can be realized, the micro electro-discharged sparks can remove the electrolytic passivation film on the workpiece surface, ultrasonic vibrating blast wave can remove the machining outcomes and renew the working fluid, the better micro-fine machining precision can be acquired. Micro-fine compound machining system is build, the processing parameters can be adjusted online within a certain range, the synchronous pulses can be developed by the cutting circuit, the synchronization of frequency and phase can be ensured between the ultrasonic vibration and the electronic power, the precision and the process stability can be improved effectively. The mechanism tests are carried about the ultrasonic modulating compound discharge-electrochemical machining, a few of micro-structures are machined in μm-level machining precision, the fine machining mean's feasibility and technical superiority are verified too.

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