Ultrasonic dispersion method used in glass polishing experiment

Zenan Chu,Qiang He,Kai Zhao,Tao Wang

doi:10.1177/16878140211011897

Zenan Chu, Qiang He + Show 2 more

Open Access

https://doi.org/10.1177/16878140211011897

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Abstract

To solve the problems of low processing efficiency and poor glass surface quality when using rare earth polishing powder to grind super-hard K9 glass. The potential, phase structure, surface morphology, and particle size distribution of the nano-rare earth polishing powder were characterized. Compare the evaluation indexes such as polishing efficiency, surface morphology, and contact angle after the polishing process is changed. The results of the comparative study show that the average surface roughness of the glass after heating ultrasonic polishing process is 0.9064 nm, the polishing rate reaches 0.748 μm/min, the average surface roughness of the glass without heating ultrasonic polishing process is 1.3175 nm, and the polishing rate reaches 0.586 μm/min, the ultrasonic assisted polishing process is superior to the conventional polishing process. The heating ultrasonic method provides experimental basis for precise and rapid processing.

Highlights

K9 optical glass has been applied in various sectors including industry, science, technology, and civilian use as the fast development of cutting-edge technologies.[1]
Higher surface polishing quality of K9 glasses with special purposes is increasingly demanded,[5] which make the development of ultrasonic polishing technology and its application in CMP a research hotspot.[6]
It is found that the effect of ultrasonic vibration on the particle trajectories and the resultant particle dynamic impact process in the stagnation zone significantly contributes to the performance enhancement of micro-hole, including the material removal rate and bottom surface morphology, rather than its effect on inducing the additional brittle erosion due to the less increase of particle impact energy

Summary

Introduction

K9 optical glass has been applied in various sectors including industry, science, technology, and civilian use as the fast development of cutting-edge technologies.[1]. Glass surface roughness and polishing rate are selected as the evaluation standard, in view of this, the influence of ultrasound assistance on K9 glass polishing performance is investigated Various measurements, such as particles size distribution, Zeta potential analysis, XRD, and SEM are used to characterize the rare earth polishing powder. YMPZ-2 automatic metallographic sample polishgrinding machine (Shenzhen Deka Precision Instrument Limited Company) was used to polish on K9 glass surface; HARKE-SPCAX3 contact angle meter (Beijing Hake Test Instrument Factory) was used to measure the contact angle of rare earth polishing solution; Nanite AFM (Nanosurf) was used to investigate the dispersity of particles in polishing solution.

Findings

Result and discussion

Conclusions