Abstract
The application of ultrasoft X-ray spectroscopy with variation of the electron excitation energy for phase analysis of thin films and phase reactions at solid/solid interfaces is considered. CNx nanocondensatess obtained by pulsed arc sputtering of graphite in the presence of nitrogen, silicon implanted with hydrogen ions, and Fe-Co silicides fabricated by ion-beam synthesis have been studied.
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Schedule a callMore From: Bulletin of The Russian Academy of Sciences: Physics
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