Ultrasmooth surface polishing based on the hydrodynamic effect

Abstract

This study will examine the feasibility of applying the hydrodynamic effect to ultrasmooth surface polishing. Differing from conventional pad polishing, hydrodynamic effect polishing is noncontact, as the polishing wheel is floated on the workpiece under the hydrodynamic effect. The material removal mechanism and the removal contour are analyzed in detail. Dynamic pressure and shear stress distribution on the workpiece are numerically simulated in three dimensions under different clearances between the polishing wheel and the workpiece, showing that the dynamic pressure distribution and the magnitude of shear stress on the workpiece are greatly influenced by the clearance. It is clearly demonstrated from fixed-point polishing experiments that material removal rates and contours are determined by the combined action of dynamic pressure and shear stress. A material removal analytic model is presented with the hydrodynamic effect polishing method. Finally, a polishing experiment is conducted on a quartz glass and the plastic scratches, cracks, and bumpy structures on the initial surface are clearly removed. Moreover, the processed surface roughness is improved to 0.145 nm rms, 0.116 nm Ra.