Abstract
For highly integrated systems for bio and chemical analysis a precise and integrated measurement of temperature is of fundamental importance. We have developed an ultrasensitive thermometer based on a micromechanical resonator for operation in air. The high quality factor and the strong temperature dependence of the resonance frequency of these bulk microresonators enable accurate temperature measurements. Here, we delineate the conditions to decouple the temperature effect on the resonance frequency, from the water adsorption/desorption on the resonator surface that happens when it is operated in air. This study enables high temperature resolution measurements, as well as the possibility of monitoring adsorption and desorption processes on the resonator surface with a resolution of 0.007 water molecules per nm2. These devices reach a temperature resolution of 3mK in air, which is one of the best ever reported temperature resolution for resonator based thermometers.
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