Ultrasensitive leak detection

Abstract

The objective of this investigation was to develop a method of detecting leaks to a sensitivity of 1.0 × 10 −13 std cm0 −3 s −1 in vacuum devices and to develop a qualifiable standard leak to provide system calibration at this leak rate. The development work demonstrated that minimum detectable leak rates of 6.5 × 10 −14 and 5.5 × 10 −15 std cm −3 s −1 are possible for respective analog and digital measurement modes.