Abstract
Ever-evolving advances in flexible magnetic sensors are promising to fuel technological developments in the fields of touchless human–machine interaction, implantable medical diagnosis, and magnetoreception for artificial intelligence. However, the realization of highly flexible and extremely sensitive magnetic sensors remains a challenge. Here, we report a cost-effective, flexible, and ultra-sensitive heterostructural magnetoelectric (ME) sensor consisting of piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT) thick films and Metglas foils. The flexible sensor exhibits a strong ME coefficient of 19.3 V cm−1 Oe−1 at low frequencies and 280.5 V cm−1 Oe−1 at resonance due to the exceptionally high piezoelectric coefficient d33 ∼ 72 pC N−1 of the constituent PZT thick films. The flexible ME sensor possesses not only ultrahigh sensitivities of 200 nT at low frequencies and 200 pT at resonance but also shows an excellent mechanical endurance. Through 5000 bending cycles (radii of ∼1 cm), the sensors showed no fatigue-induced performance degradation. This ultrasensitive flexible sensor provides a platform capable of sensing and responding to external magnetic fields and will find applications in soft robotics, wearable healthcare monitoring, and consumer electronics.
Highlights
Emergent flexible magnetic sensors are poised to scaffold developments in promising applications in touchless human–machine interaction elements, flexible navigation modules for generation consumer electronics, structural health condition monitoring for naturally curved electrical motors, and bioinspired magnetoreception for human or soft artificial intelligence
The PZT thick films were spin-coated on mica substrates via the sol–gel process, and Pt interdigital electrodes (IDEs) were deposited on PZT films by magnetron sputtering via a customdesigned mask
Metglas foils were bonded to the bottom side of the mica-based PZT films with epoxy resin
Summary
Flexible electronics have underpinned many technological innovations in the fields of paper-like rollable displays, wearable sensors, energy conversion devices, and ergonomic health monitoring systems.1–7 Emergent flexible magnetic sensors are poised to scaffold developments in promising applications in touchless human–machine interaction elements, flexible navigation modules for generation consumer electronics, structural health condition monitoring for naturally curved electrical motors, and bioinspired magnetoreception for human or soft artificial intelligence.8 To realize these promising applications, flexible magnetic sensors with performance characteristics commensurate with their rigid counterparts must be developed.
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