Abstract
In this paper, we proposed a novel double-deck displacement sensor with a high linearity based on tunable horn-shaped resonators. The designed sensor included two substrate layers etched with copper metallization in various shapes. When the upper trip-type resonator layer has a relative displacement to the bottom horn-shaped resonator layer, the resonance frequency of the sensor is redshift. High sensitivity of the sensor is around 207.2 MHz mm−1 with 4 mm linear dynamic range. We fabricate the sample of the proposed displacement sensor, in addition the simulated results are verified by experiment. The proposed displacement sensor is appropriate for using MEMS technology in further miniaturization.
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