Ultra-Precision Shaping and Polishing Experiments in Nanoparticle Colloid Jet Machining

Abstract

In this paper, ultra-precision shaping and polishing experiments have been done to research the shaping and polishing characters of nanoparticle colloid jet machining. A high-purity quartz glass sample with aspheric surface profile was employed as workpiece and polished by nanoparticle colloid jet machining. We utilized surface profilometer to measure the surface profiles of workpiece before and after shaping by nanoparticle colloid jet machining. The measurement results indicate that the nanoparticle colloid jet machining has good shaping ability to satisfy the demands for surface shape correction in ultra-precision machining. Atomic force microscopy (AFM) was utilized to observe the surface microscopic morphological characteristics of the workpiece surface polished by nanoparticle colloid jet machining. The observation results show that the roughness of the workpiece surface has been reduced from 1.919 nm RMS to 0.784 nm RMS by nanoparticle colloid jet machining. Based on the atomic force microscopy observation results, power spectral density analyses have been done to evaluate the polishing performance of the nanoparticle colloid jet machining.