Abstract

In some industrial fields such as optical part mold making or fabrication of the nano structure by ultra-precision machinery, an ultra-precision positioning system is widely used. In this paper, an experimental ultra-precision positioning system is designed and fabricated, consisted of an ultra-precision stage supported by flexure hinges, a piezoelectric actuator and an ultra-precision linear encoder. In order to obtain the system transfer function of the ultra-precision positioning system, the frequency response for the sinusoidal input was analyzed. From the bode diagram, the system was modeled in 4th order system. Also, in order to have robustness for the system uncertainty; modeling error and external disturbances, some weighting functions were selected and Hinfin controller was designed. A series of experiments was conducted using the designed Hinfin controller and it was found that this ultra-precision positioning system could be controlled in 5 nm resolution.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.