Ultraprecision finishing of micro-aspherical surface by ultrasonic assisted polishing

Abstract

Micro aspherical glass lenses are required for electronic devices, optical devices and advanced optical fiber transmission equipments. The glass lenses are manufactured by glass molding method by using micro ceramics dies such as tungsten carbide or silicon carbide (1). Therefore molding dies are most important and they were ground by ultra-precision grinding method with diamond wheel. Recently, the wavelength of used laser is becoming shorter and then the accuracies of the micro molding die are required to be much more precise (2). In this paper, ultrasonic assisted polishing methods/systems were developed in order to finish micro aspherical dies that were ground with micro diamond wheel. In the polishing experiments, the molding die of tungsten carbide was polished with diamond abrasives to test the basic polishing characteristics and the aspheric die was polished with proposed ultrasonic assisted polishing method.