Ultraprecision Diamond Turning of Glass with Ultrasonic Vibration

Abstract

By applying ultrasonic vibration to a single-crystal diamond tool-tip, ductile machining of fused silica can be achieved even for 2 μm depth of cut. The increase in the critical depth of cut is significant and is a function of the ratio of vibration speed to cutting speed. Surface roughness Ra of 100 nm was obtained for up to 2 μm depth of cut.