Ultra-low-angle microtomy and static secondary ion mass spectrometry for molecular depth profiling of UV-curable acrylate multilayers at the nanoscale

Abstract

Development of sustainable materials requires methods capable of probing the molecular composition of samples not only at the surface but also in depth. Static secondary ion mass spectrometry (S-SIMS) characterises the distribution of organic and inorganic compounds at the surface. Ultra-low-angle microtomy (ULAM) has been studied as an alternative or complementing method to the molecular depth profiling with, e.g. C(60)(+) projectiles. Acrylate-based multilayers relevant to industrial inkjet printing have been sectioned at a cutting angle below 1 degrees. In this way, analysis of the section over a distance of 1 microm allows a depth range in the order of a few nm in the original sample to be achieved. Adequate procedures to optimise the ULAM step and minimise or control the cutting artefacts have been developed. The combination of ULAM with S-SIMS has allowed a depth resolution of 10 nm to be obtained for components at a distance of 35 microm from the surface.