Abstract
Nanostructure patterning on substrate with ultrahigh-resolution creates great opportunities to couple optical, electromagnetic, mechanical properties among the functional materials, providing an alternative way to fabricate next-generation optoelectronic and biomedical nanodevices. Scanning probe microscope (SPM) works as a quite suitable tool for ultrahigh resolution (less than 1µm of pitch) and arbitrary patterns due to its tip size and flexible scanning system. Based on the capillary force, voltage, and thermal effects of the probes to the substrate, molecule patterns, surface potential patterns and topography patterns can be formed respectively. This article aims to introduce how the patterns forms, and how they assemble nanostructures, mainly based on the SPM technology. The principles, development histories, assembly processes and pattern results are introduced. In addition, several extension methods to solve the limitation of the scanning range of the probe are mentioned, such as tips arrays, soft molds or stamps, motorized moving stage, which provides powerful routes to assemble nanostructures with nanometer precision over millimeter scale in minutes.
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More From: Reference Module in Materials Science and Materials Engineering
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