Abstract
We designed and experimentally demonstrated racetrack resonators on a 3 μm thick SOI platform with intrinsic quality factors above 10 million. The racetrack configuration consists of a combination of straight sections based on rib waveguides and bend sections based on strip waveguides following a so-called Euler curve to achieve a compact footprint. The ultra-high-Q factors were achieved through a significant sidewall roughness reduction by controlled annealing in a hydrogen atmosphere, allowing to achieve propagation losses for 3 μm wide rib waveguides down to ~3 dB/m. The process potentially enables emerging PIC applications demanding ultra-low propagation losses.
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