Abstract
An ultrahigh-sensitivity fiber-tip cavity ultrasonic sensor based on optomechanical effect fabricated by Two-photon Polymerization (TPP) Technology is presented. The microcavity is based on all-polymer material with the structure of three support columns and two micro-discs, and one micro-disc with one round hole. Experiment results show that the sensor has an ultrahigh sensitivity which is 889 times as big as that of the commercial acoustic sensor. It has a good frequency response within the frequency range of 52.19 KHz-384.6 KHz. The sensor exhibits the inherent advantages of small size, compact structure, easy of fabrication, high sensitivity and wide band acoustic response, and is expected to have application in ultrasonic sensing and imaging.
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