Abstract

Flexible sensors and actuators are the basis for realizing the Internet of Everything. This study identifies specific interfacial polarization and filler dispersion challenges in flexible sensors. A novel sandwich-structured flexible sensor with polydimethylsiloxane (PDMS)-filled Nb2CTx as the interlayer and poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)]-filled barium titanate (BTO) as the upper and lower layers was designed and fabricated. The thickness of the interlayer was optimized to be 6.2 μm, resulting in an ultrahigh sensitivity of 16.05 V/N and ultrashort response time of 626 μs. The interlayer achieved an oriented arrangement of the dipoles in the upper and lower piezoelectric films through interfacial polarization, enhancing the piezoelectric output and sensitivity. The proposed mechanism was confirmed by the dielectric properties, local piezoelectric response, cross-sectional potential simulation, and interfacial electrical calculations. Additionally, the sensor effectively distinguishes various body movements, facial micro-expressions, and throat vibrations during vocalization, and can be applied to ultrahigh-sensitive self-powered flexible piezoelectric pressure sensors.

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