Abstract
The humidity sensor based on quartz crystal microbalance (QCM) has a remarkable advantage for Internet of Things (IoT) applications owing to its digital output. Herein, one lead-free perovskite Cs<sub>2</sub>SnCl<sub>6</sub> film is employed to manufacture a QCM-based humidity sensor, and the practical application on IoT is successfully performed. The fabricated humidity sensor exhibits a logarithmic linearity response and an ultra-high response of 7289 Hz for the relative humidity ranging from 11% to 85%. Furthermore, the Langmuir adsorption model is adopted to reveal the adsorption kinetics of the water molecules on the Cs<sub>2</sub>SnCl<sub>6</sub> film. These results suggest that the proposed humidity sensor could be a promising candidate for remote and smart humidity sensors.
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