Abstract
X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.
Highlights
X-ray imaging, in particular X-ray microscopy [1,2], is an appealing technique for the inspection of both organic [3,4,5] and inorganic [6,7,8] materials
To surpass the intrinsic limitations that electron-beam lithography (EBL) imposes on the manufacture of diffractive Xray optics, we introduced a zone-doubling approach [17] that overcomes the difficulty of high feature density patterning and allows us to produce extremely high aspect ratio structures with lateral dimensions in the sub-50 nm regime
We have demonstrated the feasibility of using zone-doubled diffractive X-ray optics for high resolution imaging in the multi-keV regime (4―12 keV)
Summary
X-ray imaging, in particular X-ray microscopy [1,2], is an appealing technique for the inspection of both organic [3,4,5] and inorganic [6,7,8] materials. To surpass the intrinsic limitations that EBL imposes on the manufacture of diffractive Xray optics, we introduced a zone-doubling approach [17] that overcomes the difficulty of high feature density patterning and allows us to produce extremely high aspect ratio structures with lateral dimensions in the sub-50 nm regime. This technique resembles the so-called iterated spacer lithography [18,19,20] and is based on the deposition of a thin layer of high refractive index material onto the sidewalls of a pre-patterned template made of a low refractive index material. We report on the fabrication of the zonedoubled FZPs and their characterization as focusing elements in scanning transmission X-ray microscopy
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