Ultrafast Laser Enabling Versatile Fabrication of Surface Micro-nano Structures

Abstract

Surface micro-nano structures play an important role in realizing various functions at solid surfaces and interfaces. Ultrafast lasers, especially the new-generation high-repetition rate high-power ultrafast lasers, have been proven to be powerful and versatile tools in enabling the fabrication of surface micro-nano structures. Taking the antireflection property as the key and cut-in point, this chapter presents a brief overview on the state-of-the-art and current challenges on the fabrication of surface micro-nano structures. Special focus will be placed on our achievements in the recent years in developing ultrafast laser-based approaches for the general, scalable, and controllable construction of surface micro-nano functional structures, including nanoscale structures, micro-nano dual-scale structures, and macro-micronano-nanowire multiscale structures, and the unique antireflection performances realized by these surface micro-nano structures. This chapter intends to offer readers an integrated tour of ultrafast laser fabrication techniques for surface micro-nano structures and an outlook on their great application potentials.