Abstract
Due to its excellent chemical stability, and scratch resistance, ultra-thin glass (less than 1 mm) has been widely used in the consumer electronics and photovoltaic industries. To meet the requirements of high-quality ultra-thin glass cutting, the composite cutting of ultra-thin glass based on ultrafast laser is proposed which consists of laser internal modification and surface scribing. The effects of laser pulse duration, laser pulse energy, and pulse separation rate on the laser internal modified region of ultrathin glass are studied. The cut quality of the samples under two surface groove structures is compared. The maximum edge strength of 369.07 MPa and the minimum cross-section roughness of 0.148 μm are obtained by laser composite cutting with the stamp-hole-type groove structure.
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