Abstract

A systematic study of glass scribing is presented on the benefits of ultrafast laser burst trains in generating filamentation tracks to guide cleaving of glass substrates. The interplay of Kerr self-focusing, plasma defocusing, and burst-train accumulation effects in filament formation was characterized by time-resolved in-situ microscopic imaging. Various filament-track scribing geometries were compared with and without assistance from burst-train pulse delivery or surface V-groove ablation. The cleaving guidance and reproducibility were examined together with the breaking force, facet morphology and flexural strength of cleaved substrates to assess the overall scribing and cleaving quality. The reported results attest to the benefits and flexibility of burst-mode ultrafast laser interactions to assist cleaving of optically transparent materials along well formed filament arrays.

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