Abstract
The monolithic integration of an ultrafast photodetector with an spot size transformer is presented. Using a shifting mask technique optimized taper ramp profiles are fabricated. The integrated devices exhibit a more than doubled responsivity (0.7 A/W) and about one magnitude higher misalignment tolerances compared to devices without spot size converters. The ultra large bandwith (f/sub 3dB/>50 GHz) and the excellent high power behaviour is unimpaired by the integration of the spot size converter.
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