Abstract
Phase modulation is one of the key functionalities in an integrated photonics circuit. In the silicon photonics platform, several approaches have been undertaken. The thermooptic effect is slow and relatively power hungry, whereas a carrier-based approach is fast ( >; Gb/s) but lossy and weak. Integration of other (e.g., electrooptic) materials typically struggles with fabrication issues that limit the effect. Here, we present a nanoelectromechanical systems-based approach. By applying a voltage over a freestanding slot waveguide, the slot width will change, resulting in an effective index change and thus a phase change. Using a cascaded structure, the effect can be enlarged without reducing the speed. A phase change of 40° was observed for a voltage of 13 V over a cascade of three 5.8-μm-long freestanding slots. The expected speed is in the MHz range.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
