Ultra-thin silver films grown by sputtering with a soft ion beam-treated intermediate layer

Abstract

Silver thin films have wide-ranging applications in optical coatings and optoelectronic devices. However, their poor wettability to substrates such as glass often leads to an island growth mode, known as the Volmer–Weber mode. This study demonstrates a method that utilizes a low-energy ion beam (IB) treatment in conjunction with magnetron sputtering to fabricate continuous silver films as thin as 6 nm. A single-beam ion source generates low-energy soft ions to establish a nominal 1 nm seed silver layer, which significantly enhances the wettability of the subsequently deposited silver films, resulting in a continuous film of approximately 6 nm with a resistivity as low as 11.4 µΩ.cm. The transmittance spectra of these films were found to be comparable to simulated results, and the standard 100-grid tape test showed a marked improvement in adhesion to glass compared to silver films sputter-deposited without the IB treatment. High-resolution scanning electron microscopy images of the early growth stage indicate that the IB treatment promotes nucleation, while films without the IB treatment tend to form isolated islands. X-ray diffraction patterns indicate that the (111) crystallization is suppressed by the soft IB treatment, while growth of large crystals with (200) orientation is strengthened. This method is a promising approach for the fabrication of silver thin films with improved properties for use in optical coatings and optoelectronics.