Abstract
This paper reports an ultra‐soft neural probe with a temporary high‐strength U‐section coating of polyethylene glycol (PEG) for the first time. Its fabrication is compatible with MEMS processes, and an ultrathin U‐section coating over the probe's back and sidewall is precisely formed by spinning and cold laser cutting. With this novel coating, the probe has both minimized cross‐sectional area and sufficient mechanical strength for low‐invasive penetration into the brain. Besides, the remained ultra‐soft deformable probe after PEG dissolution is expected to be the next generation of neural implants for chronic recording. © 2024 Institute of Electrical Engineers of Japan. Published by Wiley Periodicals LLC.
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