Ultra-Sensitive Si-Based Optical Sensor for Nanoparticle-Size Traditional Water Pollutant Detection

Abstract

A low-cost Si-based optical nano-sensor that monitors traditional water pollutants is introduced in this paper. The introduced sensor works in the near-infrared region, 900 nm to 2500 nm spectral range. The proposed structure consists of a Si layer with an optimized thickness of 300 nm on the top of the Al layer acting as a back reflector. On the top of the Si layer, the water pollutants are modeled as nanoparticle materials of different sizes. The finite difference time domain method is utilized to optimize the thicknesses of the Si layer by analyzing the optical light absorption considering different Si layer thicknesses and different pollutant nanoparticles’ sizes. Different interpolation techniques, including polynomials with various degrees and locally weighted smoothing quadratic regression, are used to find the best fitting model representing the simulated data points with goodness of fit analysis. Three features are proposed to identify the water pollutant with its size, peak absorption wavelength, relative amplitude, and a full width at half maximum. The device’s performance in detecting six different pollutants, silver, aluminum, copper, chromium, selenium, and ammonia, is evaluated. Sensitivity, a figure of merit, and a quality factor are used to evaluate the proposed sensor. The obtained maximum sensitivity is 11,300 nm/RIU, FOM of 740, and quality factor of 670.