Ultra-sensitive pressure sensors based on large alveolar deep tooth electrode structures with greatly stretchable oriented fiber membrane

Abstract

Electrohydrodynamic (EHD) preparation of micro-nano fibers has significant advantages in the application of ultra-sensitive detection. However, far-field EHD always has the problem of jet instability, which limits its further application. In this study, we excellently realize the generated single jet deposition of aligned fibers by constructing auxiliary electric fields and creatively designed an ultra-sensitive structure based on large alveolar deep tooth electrodes with oriented TPU fiber membrane. As the isolation layer, the oriented fiber membrane controls the formation of the electric double layers by adjusting the contact area between the tooth-shaped electrodes and the polyelectrolyte membrane. Meanwhile, with increasing the pressure, the tooth-shaped electrodes with large alveolar depth bring more sidewall surfaces contact and expand the capacitance adjustment range. Therefore, we can continuously adjust the capacitance of the pressure sensor through the oriented fiber membrane to achieve an ultra-broad linear range (1.1–100 kPa) with ultra-high sensitivity of 230 kPa−1.