Abstract
The ultra-precision surface grinder has been developed to get smooth optical and electronic parts having sub-micron accuracy and nano-meter surface roughness without polishing process. The qrinder has very precise and rigid hydro-static oil bearings. The main spindle of 125mm in diameter is made of zero-thermal expansion glass-ceramics. The depth of cut is numerically controlled in 0.1 micron. Sub-micron flatness and nano-meter surface roughness have been obtained on optical and electronic materials by the diamond wheel grinding.
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