Abstract
Based on the approximate 3D model of light-weighted SiC aspheric mirror, the deformation and stress at different positions along the radius caused by the grinding force on the mirror surface was analysed. Then the influence of processing parameters on grinding force was experimentally studied, and the prediction model of grinding force was established. Finally, the grinding experiment of light-weighted SiC aspheric mirror was carried out. The PV value of the aspheric surface form error was 4.15μm, and the Ra of surface roughness was about 28nm. The experimental results verified the feasibility of ultra-precision forming of lightweight SiC mirror by controlling grinding force based on process parameters.
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