Ultra-Precision Flycutting Microstructures on Brittle Materials

Abstract

Ultra-precision microstructures on brittle materials are critical components in optical communication industry. The requirements for Ultra-precision microstructures manufacturing are increasing recently. Traditional etching and deposition technology can not satisfy the demands of accuracy and efficiency. Ultra-precision flycutting process is presented to machining microstructures on brittle materials. The geometric model of flycutting is analyzed. A formula is established to describe the relationship between the effective cutting depth and cutting parameters. The critical depth for brittle to ductile transition is obtained by cutting experiments with varying cutting depth on quartz glass. The ductile cutting chips are achieved in fly-cutting process. A microgroove array with optical quality is obtained. It proves that ultra-precision flycutting process is an available method to manufacture microstructures with optical quality on brittle materials.