Abstract
This paper describes a recently developed new family of miniature surface resonators, used for electron spin resonance spectroscopy and imaging. The first part of the paper provides a detailed description of the operational principles of the surface resonators. It also includes sensitivity analysis for a variety of configurations with inner dimensions ranging from 150 μm down to 2 μm, operating at the Ku, Q, and W frequency bands. Most of the data presented here is based on theoretical predictions; however, some of it is accompanied by experiential results for verification. The second part of the paper describes a new type of double-surface microresonator and its production method. This new configuration enables an efficient coupling of the microwave energy from millimetre-sized microstrip lines to micron structures even at relatively low frequencies. The resonator is analysed both theoretically and experimentally – exhibiting ultra-high spin sensitivity. The conclusion of the two parts of the paper is that micron-scale surface microresonators may achieve spin sensitivity of a few thousands of spins in one second of acquisition time for special samples, such as phosphorous-doped 28Si, at cryogenic temperatures. However, further miniaturization below 1–2 microns does not seem to be beneficial, sensitivity-wise. In addition to their high spin sensitivity, these resonators have a huge conversion factor, reaching in some cases to more than 500–1000 G of microwave magnetic field with input power of 1 W. Some possible applications of these unique capabilities are also described herein.
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